Vacuum-Compatible Spectroscopy Systems

NanoSpectrum offers high-precision vacuum-compatible spectroscopy systems designed for research and industrial applications where atmospheric interference must be minimized. These platforms enable accurate, noise-reduced spectral measurements under controlled pressure conditions.
Our systems are suitable for advanced studies in laser-plasma interaction, UV emission diagnostics, and thin-film characterization.
Key Capabilities
- Operable under high, low, or ultra-high vacuum (UHV) conditions
- Vacuum feedthroughs for fiber optics and electrical connections
- Compatible with LIBS, UV-VIS spectroscopy setups
- Pressure monitoring and automated vacuum control integration
- Optional gas inlet systems for inert or reactive environments
- Chambers available in custom volumes and geometries
Applications
- Laser-plasma spectroscopy in vacuum chambers
- EUV generation
- Plasma–surface interaction experiments
- Thin-film coating process monitoring (PVD, CVD)
- Space simulation and atmospheric-free diagnostics

System Components
Chamber | Stainless steel (ISO-K, CF flanged), quartz windows, optical ports |
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Pumping System | Rotary vane + turbo molecular pumps, down to 10⁻⁶ mbar |
Spectrometer | UV-VIS or custom-configured (CCD/ICCD), fiber-coupled through feedthrough |
Control & Monitoring | Pressure gauges, gas lines, electrical control interfaces |
Software | Integrated vacuum control, spectral acquisition, and data logging |
Research Support
NanoSpectrum collaborates with universities and research institutes to customize vacuum-compatible spectroscopy platforms for grant-funded projects and thesis work. Full technical support and user training are available.